Compound semiconductor device

ABSTRACT

The compound semiconductor device comprises an i-GaN buffer layer  12  formed on an SiC substrate  10 ; an n-AlGaN electron supplying layer  16  formed on the i-GaN buffer layer  12 ; an n-GaN cap layer  18  formed on the n-AlGaN electron supplying layer  16 ; a source electrode  20  and a drain electrode  22  formed on the n-GaN cap layer  18 ; a gate electrode  26  formed on the n-GaN cap layer  18  between the source electrode  20  and the drain electrode  22 ; a first protection layer  24  formed on the n-GaN cap layer  18  between the source electrode  20  and the drain electrode  22 ; and a second protection layer  30  buried in an opening  28  formed in the first protection layer  24  between the gate electrode  26  and the drain electrode  22  down to the n-GaN cap layer  18  and formed of an insulation film different from the first protection layer.

This application is a Divisional Application of prior application Ser.No. 13/856,253 filed on Apr. 3, 2013, which is a Divisional Applicationof prior application Ser. No. 12/926,990 filed Dec. 22, 2010, which is aDivisional Application of prior application Ser. No. 12/318,577 filed onDec. 31, 2008, now U.S. Pat. No. 7,989,278 issued Aug. 2, 2011, which isa Divisional Application of prior application Ser. No. 11/265,103 filedon Nov. 3, 2005, now U.S. Pat. No. 7,494,855 issued Feb. 24, 2009, whichis a Divisional Application of prior application Ser. No. 10/756,472filed on Jan. 14, 2004, now U.S. Pat. No. 7,002,189 issued Feb. 21,2006.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims priority of Japanese PatentApplication No. 2003-6970, filed on Jan. 15, 2003, the contents beingincorporated herein by reference.

BACKGROUND OF THE INVENTION

The present invention relates to a compound semiconductor device, morespecifically to a compound semiconductor device of a FET structure usinggallium nitride (GaN) and a method for fabricating the compoundsemiconductor device.

GaN belongs to III-V semiconductors gallium arsenic (GaAs), which hasbeen already practically used as an extra high-frequency transistormaterial, also belongs to. GaN has a characteristic of high carriermobility, as has GaAs. Furthermore, the band gap of GaN is 3.4 eV, whichis higher than the band gap of GaAs, which is 1.4 eV, and GaN has acharacteristic that the electric field where the avalanche breakdowntakes place is large.

The use of GaN, which has the characteristics of high carrier mobilityand the wide bad gap, will be able to realize extra high-frequencydevices which can make high voltage resistant operations. Recently,electronic devices, such as HEMTs, etc., including electron transitlayers of the GaN of AlGaN/GaN crystal-grown on substrates of sapphire,silicon carbide (SiC), GaN, silicon (Si), etc. are actively developed(refer to, e.g., Japanese Patent Application Unexamined Publication No.2002-359256).

FIG. 15 is a sectional view of one example of the conventional HEMTstructure using AlGaN/GaN hetero junction.

An i-GaN buffer layer 102, an i-AlGaN spacer layer 104, an n-AlGaNelectron supplying layer 106 with Si as a dopant impurity implanted inand an i-AlGaN cap layer 108 are laid on a sapphire substrate 100 one onanother in the stated order.

A source electrode 110 and a drain electrode 112 of Al/Ti are formed onthe i-AlGaN cap layer 108 in ohmic contact with the i-AlGaN cap layer108. A gate electrode 114 of Au/Ni is formed on the i-AlGaN cap layer108 between the source electrode 110 and the drain electrode 112 inSchottky contact with the i-AlGaN cap layer 108.

Thus, the HEMT including the i-GaN buffer layer 102 as the electrontransit layer, and the n-AlGaN electron supplying layer 106 isconstituted.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a compoundsemiconductor device which can suppress the current collapse and canmake high-voltage resistance operation possible, and a method forfabricating the compound semiconductor device.

According to one aspect of the present invention, there is provided acompound semiconductor device comprising: a GaN active layer formed on asemiconductor substrate; an AlGaN electron supplying layer formed on theGaN active layer; a GaN cap layer formed on the AlGaN electron supplyinglayer; a source electrode and a drain electrode formed on the GaN caplayer; a gate electrode formed on the GaN cap layer between the sourceelectrode and the drain electrode; a first protection layer formed onthe GaN cap layer between the source electrode and the drain electrode;and a second protection layer of an insulation layer different from thefirst protection layer and buried in an opening formed in the firstprotection layer between the gate electrode and the drain electrode downto the GaN cap layer.

According to another aspect of the present invention, there is provideda compound semiconductor device comprising: a GaN active layer formed ona semiconductor substrate; an AlGaN electron supplying layer formed onthe GaN active layer; a GaN cap layer formed on the AlGaN electronsupplying layer; a source electrode and a drain electrode formed on theGaN cap layer; a gate electrode formed on the GaN cap layer between thesource electrode and the drain electrode; and a first protection layerformed on the GaN cap layer between the source electrode and the drainelectrode and having the sides in contact with the gate electrodetapered increasingly forward.

According to further another aspect of the present invention, there isprovided a compound semiconductor device comprising: a GaN active layerformed on a semiconductor substrate; an AlGaN electron supplying layerformed on the GaN active layer; a GaN cap layer formed on the AlGaNelectron supplying layer and having atomic layer steps formed on theupper surface; a source electrode and a drain electrode formed on theGaN cap layer; and a gate electrode formed on the GaN cap layer betweenthe source electrode and the drain electrode.

According to further another aspect of the present invention, there isprovided a method for fabricating a compound semiconductor devicecomprising: a GaN active layer formed on a semiconductor substrate; anAlGaN electron supplying layer formed on the GaN active layer; a GaN caplayer formed on the AlGaN electron supplying layer; a source electrodeand a drain electrode formed on the GaN cap layer; a gate electrodeformed on the GaN cap layer between the source electrode and the drainelectrode; and a first protection layer formed on the GaN cap layerbetween the source electrode and the drain electrode, comprising thesteps of: forming an opening in the first protection layer between thegate electrode and the drain electrode down to the GaN cap layer; andburying in the opening a second protection layer of an insulation layerdifferent from the first protection layer.

According to further another aspect of the present invention, there isprovided a method for fabricating a compound semiconductor devicecomprising: a GaN active layer formed on a semiconductor substrate; anAlGaN electron supplying layer formed on the GaN active layer; a GaN caplayer formed on the AlGaN electron supplying layer; a source electrodeand a drain electrode formed on the GaN cap layer; and a gate electrodeformed on the GaN cap layer between the source electrode and the drainelectrode, wherein in the step of forming the GaN cap layer, the GaN caplayer is formed with atomic layer steps formed on the upper surface.

As described above, the compound semiconductor device according to thepresent invention comprises: a GaN active layer formed on asemiconductor substrate; an AlGaN electron supplying layer formed on theGaN active layer; a GaN cap layer formed on the AlGaN electron supplyinglayer; a source electrode and a drain electrode formed on the GaN caplayer; a gate electrode formed on the GaN cap layer between the sourceelectrode and the drain electrode; a first protection layer formed onthe GaN cap layer between the source electrode and the drain electrode;a first protection layer formed on the GaN cap layer between the sourceelectrode and the drain electrode; and a second protection layer of aninsulation layer different from the first protection layer and buried inan opening formed in the first protection layer between the gateelectrode and the drain electrode down to the GaN cap layer, whereby thecurrent collapse can be suppressed, and the generation of gate leakcurrent can be suppressed. The operation of high voltage resistance canbe realized.

The compound semiconductor device according to the present inventioncomprises: a GaN active layer formed on a semiconductor substrate; anAlGaN electron supplying layer formed on the GaN active layer; a GaN caplayer formed on the AlGaN electron supplying layer; a source electrodeand a drain electrode formed on the GaN cap layer; a gate electrodeformed on the GaN cap layer between the source electrode and the drainelectrode; and a first protection layer formed on the GaN cap layerbetween the source electrode and the drain electrode and having thesides in contact with the gate electrode tapered increasingly forward,whereby the electric field concentration near the gate electrode ismitigated and the voltage resistance decrease due to the electric fieldconcentration can be suppressed. The operation of high voltageresistance can be realized.

The compound semiconductor device according to the present inventioncomprises: a GaN active layer formed on a semiconductor substrate; anAlGaN electron supplying layer formed on the GaN active layer; a GaN caplayer formed on the AlGaN electron supplying layer and having atomiclayer steps formed on the upper surface; a source electrode and a drainelectrode formed on the GaN cap layer; and a gate electrode formed onthe GaN cap layer between the source electrode and the drain electrode,whereby the electric field concentration on the surface of the GaN caplayer is mitigated, and the generation of the gate leak current can besuppressed. The operation of high voltage resistance can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view of the compound semiconductor deviceaccording to a first embodiment of the present invention, which shows astructure thereof.

FIG. 2 is an enlarged sectional view of the compound semiconductordevice according to the first embodiment of the present invention, whichshows a configuration of the gate electrode.

FIG. 3 is a sectional view of the compound semiconductor deviceincluding an SiN protection layer formed on an n-GaN cap layer, whichshows the structure thereof.

FIGS. 4A-4C are sectional views of the compound semiconductor deviceaccording to the first embodiment of the present invention in the stepsof the method for fabricating the same, which show the method (Part 1).

FIGS. 5A-5C are sectional views of the compound semiconductor deviceaccording to the first embodiment of the present invention in the stepsof the method for fabricating the same, which show the method (Part 2).

FIGS. 6A-6C are sectional views of the compound semiconductor deviceaccording to the first embodiment of the present invention in the stepsof the method for fabricating the same, which show the method (Part 3).

FIGS. 7A-7C is sectional views of the compound semiconductor deviceaccording to the first embodiment of the present invention in the stepsof the method for fabricating the same, which show the method (Part 4).

FIG. 8 is a graph of one example of the gate leak current decreasingeffect by the compound semiconductor device according to the firstembodiment of the present invention.

FIG. 9 is a sectional view of the compound semiconductor deviceaccording to one modification of the first embodiment of the presentinvention, which shows a structure thereof.

FIG. 10 is a sectional view of the compound semiconductor deviceincluding the n-GaN cap layer having large surface roughness, whichshows a structure thereof.

FIG. 11 is a sectional view of the compound semiconductor deviceaccording to a second embodiment of the present invention, which shows astructure thereof.

FIGS. 12A-12C are sectional views of the compound semiconductor devicein the steps of the method for fabricating the same, which show themethod (Part 1).

FIGS. 13A-13C are sectional views of the compound semiconductor devicein the steps of the method for fabricating the same, which show themethod (Part 2).

FIG. 14 is a sectional view of the compound semiconductor deviceaccording to a third embodiment of the present invention, which shows astructure thereof.

FIG. 15 is a sectional view of one example of the conventional HEMTstructure using AlGaN/GaN hetero junction.

DETAILED DESCRIPTION OF THE INVENTION

The conventional HEMT using the AlGaN/GaN hetero junction has adisadvantage that ON-resistance changes in operation, which are calledcurrent collapse, occur.

Furthermore, the amplifiers, etc. presently used in base stations ofcellular phones are required to make high-voltage operation, but oftenvoltage resistance of the conventional HEMT using the AlGaN/GaN heterojunction is not sufficient.

Even when the current collapse is successfully suppressed, the gate leakcurrent is increased, which often makes it difficult to make the voltageresistance sufficient.

A First Embodiment

The compound semiconductor device according to a first embodiment andthe method for fabricating the compound semiconductor device will beexplained with reference to FIGS. 1, 2, 3, 4A-4C, 5A-5C, 6A-6C and7A-7C. FIG. 1 is a sectional view of the compound semiconductor deviceaccording to the present embodiment, which shows a structure thereof.FIG. 2 is an enlarged sectional view of the compound semiconductordevice according to the present embodiment, which shows a configurationof the gate electrode. FIG. 3 is a sectional view of the compoundsemiconductor device with an SiN protection layer formed on an n-GaN caplayer, which show the structure thereof. FIGS. 4A-4C, 5A-5C, 6A-6C and7A-7C are sectional views of the compound semiconductor device accordingto the present embodiment in the steps of the method for fabricating thecompound semiconductor device, which show the method.

First, the structure of the compound semiconductor device according tothe present embodiment will be explained with reference to FIGS. 1 and2.

As shown in FIG. 1, an i-GaN buffer layer 12, an i-AlGaN spacer layer14, an n-AlGaN electron supplying layer 16 with Si as a dopant impurityimplanted in and an n-GaN cap layer 18 are laid on an SiC substrate 10one on another in the stated order.

A source electrode 20 and a drain electrode 22 of Al/Ti are formed onthe n-GaN cap layer 18 in ohmic contact therewith.

On the n-GaN cap layer 18 between the source electrode 20 and the drainelectrode 22, a first protection layer 24 of SiN whose nitrogen contentratio is 20% or less is formed. An opening 25 is formed in the firstprotection layer 24 down to the n-GaN cap layer 18. Through the opening25, a gate electrode 26 of Au/Ni is formed on the n-GaN cap layer 18 inSchottky contact therewith, extended on the first protection layer 24.As shown in FIG. 2, the width of the opening 25 with the gate electrode26 buried in is decreased gradually from the upper surface of the firstprotection layer 24 toward the upper surface of the n-GaN cap layer 18.That is, the sides of the first protection layer 24 in contact with thegate electrode 26 are tapered increasingly upward.

In the first protection layer 24 between the gate electrode 26 and thedrain electrode 22, an opening 28 is formed down to the n-GaN cap layer18. A second protection layer 30 of SiN whose nitrogen content ratio is20% or more is formed on the first protection layer 24, filling theopening 28. The opening 28 with the second protection layer 30 buried inis formed, spaced from the gate electrode 26 toward the drain electrode22 by, e.g., 0.05-0.5 μm.

The different nitrogen content ratios of the first protection layer 24and the second protection layer 30 makes them different in properties,such as stress, refractive index, etc. For example, the first protectionlayer 24 of SiN of a 20% or less nitrogen content ratio has a refractiveindex of 2.4-2.5, and the second protection layer 30 of SiN of a 20% ormore nitrogen content ratio has a refractive index 1.9-2.1.

Thus, a HEMT including the i-GaN buffer layer 12 functioning as theelectron transit layer, and the n-AlGaN electron supplying layer 16 isconstituted.

Device isolation regions (not shown) for isolating the HEMT devices areformed down to the i-GaN buffer layer 12 through the n-GaN cap layer 18,the n-AlGaN electron supplying layer 16 and the i-AlGaN spacer layer 14.

The compound semiconductor device according to the present embodiment ischaracterized mainly by the first protection layer 24 of SiN, and thesecond protection layer 30 of SiN buried in the first protection layer24 between the gate electrode 26 and the drain electrode 22.

In the HEMT using GaN/AlGaN hetero junction, as a structure forsuppressing the ON-resistance change in operation, which is called thecurrent collapse, the structure shown in FIG. 3, which uses an n-GaN caplayer and an SiN protection layer is considered. In this structure, asshown, an n-GaN cap layer 18 is formed on an n-AlGaN electron supplyinglayer 16. Further, an SiN protection layer 34 is formed on the GaN caplayer 18 between a gate electrode 32 and a source electrode 20, andbetween the gate electrode 32 and a drain electrode 22. The sides of theSiN protection layer 34 in contact with the gate electrode 32 aresubstantially vertical, as are not in the compound semiconductor deviceaccording to the present embodiment shown in FIGS. 1 and 2.

However, the studies by the inventor of the present invention have foundthat the HEMT of the structure shown in FIG. 3 has a disadvantage thatthe gate leak current quantity is larger than specifications required byactual devices. That is, the HEMT of the structure has good values ofabove 100 V or more in the specifications, such as the breakdown voltageresistance and the gate voltage resistance but has large absolute valuesof the leak current.

The gate leak current of the HEMT of the structure shown in FIG. 3 willbe due to the presence of a leak path in the interface between the SiNprotection layer 34 and the n-GaN cap layer 18. Even with the Schottkyvoltage resistance immediately below the gate being sufficient, when avoltage above a pinch-off voltage is applied to the gate electrode, leakcurrent flows from the gate electrode side-wise, causing the voltageresistance decrease.

The second protection layer 30 of the compound semiconductor deviceaccording to the present embodiment is formed by forming the opening 28in the first protection layer 24 and then burying an SiN film in theopening 28, as will be described later. At this time, the surface of then-GaN cap layer 18 exposed through the opening 28 in the firstprotection layer 24 is damaged, or oxides are formed thereon.Resultantly, a pinning level is formed between the second protectionlayer 30 and the n-GaN cap layer 18. Thus, although a path for the leakcurrent is formed between the first protection layer 24 of SiN and then-GaN cap layer 18, the path is broken immediately below the secondprotection layer 30, whereby the generation of the leak current can besuppressed. Consequently, the voltage resistance can be improved.

In the present embodiment, the second protection layer 30 is formed onthe first protection layer 24, and the second protection layer 30 isburied in the opening 28 between the gate electrode 26 and the drainelectrode 22. However, it is not essential to form the second protectionlayer 30 even on the first protection layer 24, and the secondprotection layer 30 may be buried in the first protection layer 24between the gate electrode 26 and the drain electrode 22.

The compound semiconductor device according to the present embodiment isalso characterized mainly in that the nitrogen content ratio of SiNwhich is the material of the first protection layer 24 is below 20% orless. The nitrogen content ratio of SiN forming the first protectionlayer 24 is below 20% or less, whereby the trap level between the firstprotection layer 24 and the n-GaN cap layer 18 is decreased. Thus, theso-called current collapse phenomena that the ON-resistance is changedin operation can be suppressed.

Furthermore, the compound semiconductor device according to the presentembodiment is also characterized in that, as shown in FIG. 2, the sidesof the first protection layer 24 in contact with the gate electrode 26are tapered increasingly upward. That is, the compound semiconductordevice according to the present embodiment is characterized in that thewidth of the opening 25 which is formed in the first protection layer 24and in which the gate electrode 26 is buried is gradually decreased fromthe upper surface of the first protection layer 24 toward the uppersurface of the n-GaN cap layer 18.

In the method for fabricating the compound semiconductor device shown inFIG. 3, the SiN protection layer 34 is formed on the n-GaN cap layer 18between the source electrode 20 and the gate electrode 32 and betweenthe drain electrode 22 and the gate electrode 32 after gate electrode 32is formed. The interfaces between the SiN protection layer 34 and thegate electrode 32 buried in the SiN protection layer 34 are accordinglysubstantially vertical. Resultantly, electric fields are concentratednear the corners between the n-GaN cap layer 18 and the gate electrode32 in Schottky contact therewith, and the voltage resistance is lowered.

In contrast to this, in the compound semiconductor device according tothe present embodiment, as shown in FIG. 2, the width of the opening 25with the gate electrode 26 buried in is gradually decreased from theupper surface of the first protection layer 24 to the upper surface ofthe n-GaN cap layer 18, whereby the electric field concentration nearthe corners between the n-GaN cap layer 18 and the gate electrode 26 inSchottky contact therewith is mitigated. Accordingly, the voltageresistance decrease due to the electric field concentration can besuppressed.

In the compound semiconductor device according to the presentembodiment, the gate electrode 26 is in Schottky contact with the n-GaNcap layer 18 through the opening 25 formed in the first protection layer24 and is extended on the first protection layer 24. However, the gateelectrode 26 may not be extended on the first protection layer 24. Aslong as the width of the opening 25 with the gate electrode 26 buried inis gradually decreased from the upper surface of the first protectionlayer 24 toward the upper surface of the n-GaN cap layer 18, the voltageresistance decrease due to the electric filed concentration can besuppressed.

Next, the method for fabricating the compound semiconductor deviceaccording to the present embodiment will be explained with reference toFIGS. 4A-4C, 5A-5C, 6A-6C and 7A-7C.

First, on the SiC substrate 10, the undoped i-GaN buffer layer 12 of,e.g., a 1 μm-thickness is formed by, e.g., MOCVD (Metal Organic ChemicalVapor Deposition).

Next, on the i-GaN buffer layer 12, the undoped i-AlGaN spacer layer 14of, e.g., 3 nm-thickness is formed by, e.g., MOCVD.

Then, on the i-AlGaN spacer layer 14, the n-AlGaN electron supplyinglayer 16 of, e.g., a 2×10¹⁸ cm⁻³ Si dose and a 25 nm-thickness is formedby, e.g., MOCVD.

Next, on the n-AlGaN electron supplying layer 16, the n-GaN cap layer 18of, e.g., a 5×10¹⁸ cm⁻³ Si dose and a 5 nm-thickness by, e.g., MOCVD.The film thickness of the n-GaN cap layer 18 is not limited to 5 nm andcan be, e.g., 10 nm or less.

Thus, on the SiC substrate 10, the i-GaN buffer layer 12, the i-AlGaNspacer layer 14, the n-AlGaN electron supplying layer 16 and the n-GaNcap layer 18 are laid one on another in the stated order (see FIG. 4A).

Then, Al/Ti is vapor deposited on the n-GaN cap layer 18 in a requiredregion by, e.g., vacuum evaporation to form an Al/Ti film. Then, theAl/Ti film is patterned to form the source electrode 20 and the drainelectrode 22 of Al/Ti.

Next, the device isolation regions (not shown) are formed by ionimplantation to isolate the HEMT devices.

Then, an SiN film 38 whose nitrogen content ratio is 20% or less isformed on the entire surface by, e.g., plasma CVD (se FIG. 4B). The filmthickness of the first protection layer 24 can be in the range of, e.g.,10-200 nm.

By etching using a mask, the SiN film 38 formed on the entire surfaceexcept that formed on the n-GaN cap layer 18 between the sourceelectrode 20 and the drain electrode 22 is removed (see FIG. 4C). Thus,the first protection layer 24 of the SiN film 38 whose nitrogen contentratio is 20% or less is formed the n-GaN cap layer 18 between the sourceelectrode 20 and the drain electrode 22.

Then, a resist for fine gates is applied to the entire surface by, e.g.,spin coating to form a resist film 40. Then, the resist film 40 ispatterned by photolithography to form the opening 42 in the resist film40 down to the first protection layer 24 between the source electrode 20and the drain electrode 22 (see FIG. 5A).

Next, with the resist film 40 with the opening 42 formed in as the mask,dry etching using, e.g., sulfur hexafluoride (SF₆) is performed to formthe opening 25 in the first protection layer 24 down to the n-GaN caplayer 18 (see FIG. 5B). At this time, for example, the dry etching usingSF₆ is performed down to the n-GaN cap layer 18 by isotropic etching ata below 300 angstrom/min etching rate. The dry etching is followed byside etching with an HF-based etching liquid at an etching rate of about100 angstrom/min. Thus, the sides of the first protection layer 24 whichare exposed in the opening 25 and are to be brought into contact withthe gate electrode can be tapered increasingly upward.

After the opening 25 has been formed in the first protection layer 24,the resist film 40 used as the mask is removed.

Then, a resist is applied to the entire surface by, e.g., spin coatingto form a resist film 46. Then, the resist film 46 is patterned byphotolithography to form an opening 48 for exposing a wider region thanthe opening 25, which contains the region where the opening 25 has beenformed in the first protection layer 24 (see FIG. 5C).

Next, Au/Ni is vapor deposited on the entire surface by, e.g., vacuumvapor deposition to form an Au/Ni film 50 (see FIG. 6A). Subsequently,the resist film 46 is removed to lift off the unnecessary Au/Ni film 50.Thus, the gate electrode 26 of the Au/Ni having the configuration inwhich the part higher than the first protection layer 24 overhangs onthe first protection layer 24 is formed (see FIG. 6B).

Next, a resist is applied to the entire surface by, e.g., spin coatingto form a resist film 52. Then, the resist film 52 is patterned byphotolithography to form an opening 54 in the resist film 52 down to thefirst protection layer 24 in a prescribed region between the gateelectrode 26 and the drain electrode 22 (see FIG. 6C).

Next, with the resist film 52 with the opening 54 formed in as the mask,dry etching using, e.g., SF₆ to form an opening 28 in the firstprotection layer 24 in a prescribed region between the gate electrode 26and the drain region 22 down to the n-GaN cap layer 18 (see FIG. 7A).After the opening 28 has been formed, the resist film 52 used as themask is removed.

Then, an SiN film 58 of a nitrogen content ratio of 20% or more isformed on the entire surface by, e.g., plasma CVD (see FIG. 7B).

Then, by etching using a mask, the SiN film 58 formed on the entiresurface except that formed on the first protection layer 24 between thesource electrode 20 and the drain electrode 22 is removed (see FIG. 7C).Thus, on the first protection layer 24, the second protection layer 30is formed of the SiN film 58 of a 20% or more nitrogen content ratioburied in the opening 28 formed in the first protection layer 24.

Thus, the compound semiconductor device according to the presentembodiment shown in FIG. 1 is fabricated.

FIG. 8 is a graph of one example of the gate leak current decreasingeffect of the compound semiconductor device according to the presentembodiment fabricated in the process described above. On the compoundsemiconductor device according to the present embodiment shown in FIG. 1and the compound semiconductor device shown in FIG. 3, the gate voltageV_(g) was swept to measure the gate current I_(g). In FIG. 8, the graphindicated by the ● marks is of changes of I_(g) for V_(g) measured onthe compound semiconductor device according to the present embodiment.In FIG. 8, the graph indicated by the ∘ marks is of changes of I_(g) forV_(g) measured on the compound semiconductor device. In the graph ofFIG. 8, −V_(g) is taken on the horizontal axis, and −I_(g) is taken onthe vertical axis.

As evident in the graph of FIG. 8, the compound semiconductor deviceaccording to the present embodiment sufficiently decreases the leakcurrent in comparison with the compound semiconductor device shown inFIG. 3.

As described above, the compound semiconductor device according to thepresent embodiment includes the first protection layer 24 of SiN, andthe second protection layer 30 buried in the first protection layer 24between the gate electrode 26 and the drain electrode 22 and formed ofSiN which is different from the SiN forming the first protection layer24, whereby the path of leak current formed between the first protectionlayer 24 and the n-GaN cap layer 18 is broken immediately below thesecond protection layer to thereby suppress the generation of leakcurrent. Accordingly, the voltage resistance can be improved.

According to the present embodiment, the nitrogen content ratio of SiNforming the first protection layer 24 is set at 20% or less, whereby thetrap level between the first protection layer 24 and the n-GaN cap layer18 can be less. Thus, the occurrence of the so-called current collapsephenomena that the ON-resistance changes in operation can be suppressed.

According to the present embodiment, the sides of the first protectionlayer 24 in contact with the gate electrode 26 are tapered increasinglyupward, whereby the electric field concentration near the cornersbetween the n-GaN cap layer 18 and the gate electrode 26 in Schottkycontact with the n-GaN cap layer 18 in the opening 25 is mitigated.Thus, the voltage resistance decrease due to the electric fieldconcentration can be suppressed.

In the present embodiment, the gate electrode 26 is formed on the n-GaNcap layer 18 in Schottky contact therewith through the opening 25,extended on the first protection layer 24. However, the gate electrodeis not limited to this configuration.

For example, the gate electrode may have the same configuration as thatof the compound semiconductor device shown in FIG. 3. In this case, asshown in FIG. 9, the source electrode 20 and the drain electrode 22 ofAl/Ti are formed on the n-GaN cap layer 18 in ohmic contact therewith.On the n-GaN cap layer 18 between the source electrode 20 and the drainelectrode 22, the gate electrode 32 of Au/Ni is formed in Schottkycontact therewith. The first protection layer 24 of SiN of a nitrogencontent ratio of 20% or less is formed on the n-GaN cap layer 18 betweenthe gate electrode 32 and the source electrode 20 and between the gateelectrode 32 and the drain electrode 22. An opening 28 is formed in thefirst protection layer 24 between the gate electrode 32 and the drainelectrode 22 down to the n-GaN cap layer 18. The second protection layer30 of a nitrogen content ratio of 20% or more is buried in the opening28.

In the compound semiconductor device shown in FIG. 9 as well, the secondprotection layer 30 is buried in the first protection layer 24 betweenthe gate electrode 32 and the drain electrode 22, whereby the generationof the gate leak current is suppressed, and the voltage resistance isimproved.

The compound semiconductor device shown in FIG. 9 can be fabricated asfollows. The source electrode 20, the drain electrode 22 and the gateelectrode 32 are formed respectively on the n-GaN cap layer 18, and thenthe first protection layer 24 of SiN is formed on the entire surface.Next, by etching using a mask, the first protection layer 24 formed onthe entire surface is removed except that formed between the gateelectrode 32 and the source electrode 20 and between the gate electrode32 and the drain electrode 22 formed on the n-GaN cap layer. Then, inthe same way as in the present embodiment described above, the opening28 is formed in the first protection layer 24 between the gate electrode32 and the drain electrode 22, and the second protection layer 30 isburied in the opening 28. Thus, the compound semiconductor device shownin FIG. 9 is fabricated.

A Second Embodiment

The compound semiconductor device according to a second embodiment ofthe present invention and the method for fabricating the compoundsemiconductor device will be explained with reference to FIGS. 10, 11,12A-12C and 13A-13C. FIG. 10 is a sectional view of the compoundsemiconductor device including an n-GaN cap layer whose surfaceroughness is large, which shows the structure thereof. FIG. 11 is asectional view of the compound semiconductor device according to thepresent embodiment, which shows a structure thereof. FIGS. 12A-12C and13A-13C are sectional views of the compound semiconductor deviceaccording to the present embodiment in the steps of the method forfabricating the compound semiconductor device. The same members of thepresent embodiment as those of the compound semiconductor deviceaccording to the first embodiment and the method for fabricating thesemiconductor device are represented by the same reference numbers notto repeat or to simplify their explanation.

As in the steps for fabricating the compound semiconductor device shownin FIG. 3, in growing an AlGaN layer it is difficult to grow the surfaceflat. When the n-GaN cap layer 18 is formed, the film thickness isinsufficient, and depending on the temperature increase or decreaseconditions, etc. upon forming the film, the upper surface of the formedn-GaN cap layer 18 is rough as shown in FIG. 10. For example, thesurface roughness of the n-GaN cap layer 18 has large values of 10angstrom or more.

Such large roughness of the n-GaN cap layer 18 causes partial electricfield concentration on the upper surface, which is one factor forgenerating the gate leak current. In order to suppress the generation ofthe gate leak current to improve the voltage resistance, the uppersurface of the n-GaN cap layer 18 must be flatter.

In the compound semiconductor device according to the presentembodiment, the n-GaN cap layer 18 is formed under prescribed growingconditions to reduce the surface roughness of the n-GaN cap layer 18,whereby the electric field concentration on the upper surface of then-GaN cap layer 18 to thereby suppress the generation of the gateelectrode.

First, the structure of the compound semiconductor device according tothe present embodiment will be explained with reference to FIG. 11.

An i-GaN buffer layer 12, an i-AlGaN spacer layer 14, an n-AlGaNelectron supplying layer 16 with Si as a dopant impurity implanted inand an n-GaN cap layer 18 are formed on an SiC substrate 10 one onanother in the stated order. The n-GaN cap layer 18 has a stepped uppersurface of, e.g., 1-5 nm height atomic layer steps formed of severalatomic layers laid one on another. The surface roughness of the n-GaNcap layer 18 is as small as 0.1-5 angstrom.

A source electrode 20 and a drain electrode 22 of Al/Ti are formed onthe n-GaN cap layer 18 having the stepped surface in ohmic contacttherewith. A gate electrode 32 of Au/Ni is formed on the n-GaN cap layer18 between the source electrode 20 and the drain electrode 22 inSchottky contact therewith.

An SiN protection layer 34 is formed on the n-GaN cap layer 18 betweenthe gate electrode 32 and the source electrode 20 and between the gateelectrode 32 and the drain electrode 22. The nitrogen content ratio ofthe SiN protection layer 34 may be, e.g., 20% or less, as is of thefirst protection layer 24 of the compound semiconductor device accordingto the first embodiment. Thus, the generation of the current collapsecan be suppressed, as can in the first embodiment.

The compound semiconductor device according to the present embodiment ischaracterized mainly by the n-GaN cap layer 18 having the atomic layersformed in steps on the upper surface and having the upper surface ofsmall roughness in the form of steps. The small roughness of the uppersurface of the n-GaN cap layer 18 mitigates the electric fieldconcentration on the upper surface of the n-GaN cap layer 18, wherebythe generation of the gate leak current can be suppressed, and thevoltage resistance can be improved.

Then, the method for fabricating the compound semiconductor deviceaccording to the present embodiment will be explained with reference toFIGS. 12A-12C and 13A-13C.

First, in the same way as in the first embodiment, the i-GaN bufferlayer 12, the i-AlGaN space layer 14 and the n-AlGaN electron supplyinglayer 16 are sequentially formed on the SiC substrate 10 (see FIG. 12A).

Next, the n-GaN cap layer 18 having the stepped surface is formed (seeFIG. 12B). As conditions for growing the n-GaN cap layer 18 are, forexample, the V/III ratio of the GaN is controlled to be V/III>10000, thegrowing rate is retained to be 20 angstrom/s or below, and H₂ gas aloneis the carrier of the raw material gases. In the temperature decreasingprocessing following the growth of the n-GaN cap layer 18, 1 liter ormore of NH₃ gas is flowed in the film forming chamber until thesubstrate temperature becomes 500° C. The n-GaN cap layer 18 is grownunder such growing conditions, whereby the atomic layer steps of aplurality of the atomic layers can be formed on the upper surface, andthe surface roughness can be reduced to a value as small as, e.g., 5angstrom or less.

Then, Al/Ti is vapor deposited by, e.g., vacuum vapor deposition on then-GaN cap layer 18 having the upper surface stepped in a prescribedregion to form an Al/Ti film. Then, the deposited Al/Ti film ispatterned to form the source electrode 20 and the drain electrode 22 ofthe Al/Ti (see FIG. 12C).

Next, a resist is applied to the entire surface by, e.g., spin coatingto form a resist film 60. Then, the resist film 60 is patterned byphotolithography to form an opening 62 down to the n-GaN cap layer 18 ina prescribed region between the source electrode 20 and the drainelectrode 22 (see FIG. 13A).

Then, Au/Ni is vapor deposited on the entire surface by, e.g., vacuumvapor deposition to form an Au/Ni film 64 (see FIG. 13B). Subsequently,the resist film 60 is removed to thereby lift off the unnecessary Au/Nifilm 64. Thus, the gate electrode 32 of the Au/Ni film 64 is formed (seeFIG. 13C).

Next, the SiN protection layer 34 is formed on the entire surface by,e.g., plasma CVD. Subsequently by etching using a mask, the SiNprotection layer 34 formed on the entire surface is removed except thatformed on the n-GaN cap layer 18 between the gate electrode 32 and thesource electrode 20 and between the gate electrode 32 and the drainelectrode 22.

Thus, the compound semiconductor device according to the presentembodiment shown in FIG. 11 is fabricated.

As described above, according to the present embodiment, growthconditions, such as the V/III ratio of the GaN, the growing rate, etc.,are controlled to thereby form the n-GaN cap layer 18 having the uppersurface formed in the atomic layer steps and small surface roughness,whereby the electric field concentration on the upper surface of then-GaN cap layer 18 can be mitigated. Thus, the generation of the gateleak current can be suppressed, and the voltage resistance can beimproved.

A Third Embodiment

The compound semiconductor device according to a third embodiment of thepresent invention and the method for fabricating the semiconductordevice will be explained with reference to FIG. 14. FIG. 14 is asectional view of the compound semiconductor device according to thepresent embodiment, which shows a structure thereof. The same members ofthe present embodiment as those of the compound semiconductor deviceaccording to the first and second embodiment and the method forfabricating the semiconductor device are represented by the samereference numbers not to repeat or to simplify their explanation.

In the second embodiment described above, the compound semiconductordevice including the SiN protection layer 34 shown in FIG. 3 has then-GaN cap layer 18 formed under growing condition which permit theatomic layer steps to be formed on the upper surface, whereby thesurface roughness of the n-GaN cap layer 18 is reduced. The compoundsemiconductor device according to the present embodiment corresponds tothe compound semiconductor device according to the first embodimentincluding the first protection layer 24 and the second protection layer30, which includes an n-GaN cap layer 18 formed under the same growingconditions for forming the n-GaN cap layer 18 having the atomic layersteps on the upper surface in the same way as in the second embodiment,whereby the surface roughness of said n-GaN cap layer 18 is reduced.

In the compound semiconductor device according to the presentembodiment, as shown n FIG. 14, the compound semiconductor deviceaccording to the first embodiment shown FIG. 1 includes the n-GaN caplayer 18 having the atomic layer steps formed on the upper surface,whereby the n-GaN cap layer 18 has a stepped upper surface of smallsurface roughness.

In the semiconductor device according to the first embodiment shown inFIG. 1, n-GaN cap layer 18 has the upper surface in the atomic layersteps of small surface roughness, whereby in addition to the effect ofimproving the voltage resistance by the provision of the secondprotection layer 30, the configuration of the sides of the firstprotection layer 24 in contact with the gate electrode, etc., theelectric field concentration is mitigated by the flat upper surface ofthe n-GaN cap layer 18, and the voltage resistance can be more improved.

The compound semiconductor device according to the present embodimentcan be fabricated by the method for fabricating the compoundsemiconductor device according to the first embodiment in which then-GaN cap layer 18 is formed under the same growing conditions as in thesecond embodiment.

Modified Embodiments

The present invention is not limited to the above-described embodimentsand can cover other various modifications.

For example, in the above-described embodiments, the SiC substrates 20are used. However, SiC substrates are not essential, and in place of theSiC substrates 10, sapphire substrates, GaN substrates, Si substrate,etc. can be used.

In the above-described embodiments, the first protection layer 24 andthe second protection layer 30 are formed of SiN. However, the materialof the first protection layer 24 and the second protection layer 30 isnot limited to SiN. For example, the first protection layer 24 is formedof SiN, MgO or ZnO, and the second protection layer 30 is formed ofSiO₂, SiON or AlN.

In the above-described embodiments, one SiN layer of a nitrogen contentratio of 20% or less is formed as the first protection layer. However,the first protection layer is not essentially a single layer and canhave a layer structure. For example, a plurality of SiN films ofdifferent nitrogen content ratios are formed one on another to form alayer film, and the layer film may be used as the first protectionlayer.

The composition of the AlGaN layer of the n-AlGaN electron supplyinglayer 16, etc. of the above-described embodiments may satisfyAlGa_((1-x))N (0<x≦1). The Al composition is suitably changed to therebyadjust the concentration of the two-dimensional electron gas.Furthermore, the Al composition is suitably adjusted to thereby adjustthe surface roughness of the AlGaN layer. For example, the AlGaN layerforming the compound semiconductor device can have an Al composition,i.e., a value of x in the range of 0.15-0.3.

In the above-described embodiments, the i-AlGaN spacer layer 14 isprovided but is not essential.

What is claimed is:
 1. A compound semiconductor device comprising: a GaNactive layer formed over a semiconductor substrate; an AlGaN carriersupplying layer formed over the GaN active layer; a GaN cap layer formedover the AlGaN carrier supplying layer; a source electrode and a drainelectrode formed over the AlGaN carrier supplying layer; a protectionlayer formed over the GaN cap layer between the source electrode and thedrain electrode and having an opening reaching the GaN cap layer betweenthe source electrode and the drain electrode, the opening exposing asurface of the GaN cap layer, a width of the opening being graduallyincreased from the surface of the GaN cap layer toward a surface of theprotection layer; and a gate electrode formed in the opening, whereinatomic layer steps are formed on the upper surface of the GaN cap layer.2. The compound semiconductor device according to claim 1, wherein thegate electrode is formed, extended on the protection layer.
 3. Thecompound semiconductor device according to claim 1, wherein theprotection layer is formed of SiN.
 4. The compound semiconductor deviceaccording to claim 1, wherein the protection layer is formed of SiN of anitrogen content ratio of 20% or less.
 5. The compound semiconductordevice according to claim 1, wherein the protection layer includes twoor more SiN films of different nitrogen content ratios.
 6. A compoundsemiconductor device comprising: a compound stacked structure includinga GaN active layer formed over a semiconductor substrate, an AlGaNcarrier supplying layer formed over the GaN active layer, and a GaN caplayer formed over the AlGaN carrier supplying layer; a source electrodeand a drain electrode formed over the AlGaN carrier supplying layer; aprotection layer formed on a surface of the GaN cap layer of thecompound stacked structure between the source electrode and the drainelectrode and having an opening reaching the surface of the GaN caplayer of the compound stacked structure between the source electrode andthe drain electrode, a width of the opening being continuously increasedfrom the surface of the GaN cap layer of the compound stacked structuretoward a surface of the protection layer; and a gate electrode formed inthe opening, wherein atomic layer steps are formed on the upper surfaceof the GaN cap layer.
 7. The compound semiconductor device according toclaim 1, wherein an angle between a side surface of the gate electrodeand the surface of the GaN cap layer at the surface of the GaN cap layeris smaller than 90°.
 8. The compound semiconductor device according toclaim 6, wherein an angle between a side surface of the gate electrodeand the surface of the GaN cap layer at the surface of the GaN cap layeris smaller than 90°.
 9. A compound semiconductor device comprising: aGaN active layer formed over a semiconductor substrate; an A1GaN carriersupplying layer formed over the GaN active layer; a GaN cap layer formedover the A1GaN carrier supplying layer; a source electrode and a drainelectrode formed over the A1GaN carrier supplying layer; a SiNprotection layer formed over the GaN cap layer between the sourceelectrode and the drain electrode and having an opening between thesource electrode and the drain electrode, a width of the opening beinggradually increased from a lower side of the SiN protection layer towarda direction of a thickness of the SiN protection layer; and a gateelectrode formed in the opening, wherein a surface of the GaN cap layeris formed with atomic layer steps.
 10. The compound semiconductor deviceaccording to claim 9, wherein the gate electrode is formed, extended onthe SiN protection layer.
 11. The compound semiconductor deviceaccording to claim 9, wherein the SiN protection layer is a stacked filmof two or more SiN films of different nitrogen content ratios.
 12. Thecompound semiconductor device according to claim 10, wherein the SiNprotection layer is a stacked film of two or more SiN films of differentnitrogen content ratios.
 13. The compound semiconductor device accordingto claim 9, wherein the atomic layer steps are formed of several atomiclayers laid one on another.
 14. The compound semiconductor deviceaccording to claim 9, wherein a height of the atomic layer steps is 1nm-5 nm.
 15. The compound semiconductor device according to claim 9,wherein a surface roughness of the GaN cap layer is 0.1 angstrom-5angstrom.